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基于激光干涉法的CO2气体压力测量
引用本文:张博涵,杨军,谢兴娟,张大治,姜延欢.基于激光干涉法的CO2气体压力测量[J].计测技术,2021(6).
作者姓名:张博涵  杨军  谢兴娟  张大治  姜延欢
作者单位:(航空工业北京长城计量测试技术研究所,北京 100095)
摘    要:气体压力无接触式测量,是激光技术应用的重要研究方向。为解决气体压力测量过程中的溯源问题,设计了一种基于激光干涉技术的压力测量方法,通过洛伦兹-洛伦茨方程、气体状态方程和光程差方程的理论研究,建立了基于光程差的压力测量模型,将压力测量问题追溯到光程变化量上。并以CO2为研究对象,搭建压力测量实验系统,开展了293K,313K,333K温度条件下,压力范围为1~3atm的压力测量实验。实验结果显示:压力测量值与实际值有较高的吻合度,相对误差在5%以内,证明压力测量溯源模型的正确性。

关 键 词:激光干涉法  气体压力  气体状态方程  光程

CO2 Gas Pressure Measurement Based on Laser Interferometry
Abstract:The non-contact measurement of gas pressure is an important research direction in the application of laser technology. In order to solve the problem of traceability in the process of gas pressure measurement, a pressure measurement method based on laser interference technology is designed. Through the theoretical research of the Lorentz-Lorenz equation, the gas state equation and the optical path difference equation, a pressure measurement model based on the optical path difference is established, and the pressure measurement problem is traced back to the optical path difference. With CO2 as the research object, a pressure measurement experiment system was built to carry out pressure measurement experiments with a pressure range of 1~3atm under the conditions of 293K, 313K, and 333K. The experimental results show that the pressure measurement value is in good agreement with the actual value, and the relative error is within 5%, which proves the correctness of the pressure measurement traceability model.
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