精密微小装配中的传感器与测量技术

装配是高性能精密微小器件或产品制造过程中的关键环节，由于零件及其关键结构的尺寸微小，微小装配必然是基于传感器与测量技术的精密装配。在微小零件装配过程中，需要精确测量待装配零件之间的相对位置和姿态的偏差，控制配合零件之间的接触力或接触状态。首先对用于精密微小装配的传感器技术进行了概述；然后结合精密微小装配中的应用需求，对机器视觉、力觉等主要传感器与测量技术进行了综述，并分析了精密测量与装配控制的技术与方法，旨在对精密装配相关的技术开发、装配设备研制提供参考和借鉴。

The Sensors and Measurement Technology for Assembly of Miniature Devices

Assembly is the key step for fabrication of high performance precision miniature devices or products, as the dimensions of the parts and their key structures are small, the assembly is inevitable to be sensor-based precision assembly. During assembly, the deviation of the position and orientation between the mating parts needs to be precisely measured, as well as the contact force or state to be controlled. Firstly, the sensors technology for assembly of miniature devices are briefly described, and then in combination of the application requirement of precision assembly of miniature devices, the vision sensor, the micro force senor, etc. and measurement technology are reviewed, precision measurement method and assembly control techniques are analyzed, aiming to provide reference value for the progress of precision assembly technology and development of assembly equipment.