光栅机分度误差的实时测量与研究

本文提出了对光栅分度误差进行实时测量的方法。文中阐述了这一方法的原理和实现过程。根据实际测量结果对机器进行了精细调整,并对测量数据进行分析,给出了光栅机的分度精度,同时根据Stroke理论应用Fourier变换方法分析了分度误差对光栅谱线产生的影响,实践证明,用运算法得到的谱线与用光谱法得到的谱线基本一致。

The Real Time Measurement and Study on Ruling Error of Grating Engine

In this paper,a new method to measure the ruling errors of grating engine is given,it's theory and realizing process are shown.The ruling accuracy of the engine is given by this method.According to Stroke,we analysis the effect of the ruling errors to diffraction pattern.It is proved the calculated result is coincident with the actual pattern.On the basis of the result,we adjust the engine accurately.