|
|||||
|
|
A three phase serpentine micro electrode array for AC electroosmotic flow pumping |
|
| Authors: | Kongying Xie Yongjun Lai Xin Guo Rob J Campbell |
| Affiliation: | (1) Department of Mechanical and Materials Engineering, Queen’s University, Kingston, ON, K7L3N6, Canada;(2) Department of Ophthalmology, Queen’s University, Kingston, ON, K7L3N6, Canada;(3) Hotel Dieu Hospital, Kingston, ON, K7L5G2, Canada; |
| Abstract: | A new three-phase electrode array with a serpentine electrode is designed and prototyped using PolyMUMPs process for micro flow pumping. Numerical model of the micropump has been developed using COMSOL Multiphysics™. Experimental testing is conducted and time-averaged flow velocities from testing and simulation agree well. Peak time-averaged flow velocity of 270 μm/s is achieved at 30 Hz using ethanol. |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |