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Step-flow growth of nanolaminate Ti3SiC2 epitaxial layers on 4H-SiC(0 0 0 1) |
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| Authors: | Kristina Buchholt Per Eklund Jens Jensen Jun Lu Anita Lloyd Spetz Lars Hultman |
| Affiliation: | a Department of Physics, Chemistry and Biology, IFM, Linköping University, 581 83 Linköping, Sweden |
| Abstract: | |
| Keywords: | Sputtering Atomic force microscopy (AFM) Helium ion microscopy (HIM) Transmission electron microscopy (TEM) Crystal structure |
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