Low-loss polyimide-Ta2O5-SiO2hybrid ARROW waveguides |
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| Authors: | Chu AK Lan IJ Chang HW Sheng MH |
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| Affiliation: | Inst. of Electro-Optical Eng., Nat. Sun Yat-Sen Univ., Kaohsiung; |
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| Abstract: | A low-loss polyimide-Ta2O5-SiO2 hybrid antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW device was fabricated using both the organic and dielectric thin-film technologies. It consists of the fluorinated polyimide, tantalum pentoxide (Ta2O5), and silicon dioxide (SiO2) hybrid layers deposited on a Si substrate. For transverse electric polarized light, the propagation loss of the waveguide as low as 0.4 dB/cm was obtained at 1.31 μm. The propagation loss for transverse magnetic polarized light is 1.5 dB/cm. An ARROW waveguide fabricated using the polyimide-Ta2O5 -polyimide material system is also presented for comparison |
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