| AES测薄膜厚度的误差分析与修正 |
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| 引用本文： | 盛国裕.AES测薄膜厚度的误差分析与修正[J].现代仪器,2000(5):44-45,38. |
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| 作者姓名： | 盛国裕 |
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| 作者单位： | 中国计量学院,机电工程教研室,杭州,310034 |
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| 摘 要： | 本文介绍了AES测薄膜厚度的原理和方法,分析了测试过程中的各种误差,并探讨了各种误差的修正方法。
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| 关 键 词： | 薄膜 厚度 误差 |
The error analysis and correct of measuring film thickness with aes |
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| Sheng Guo Yu.The error analysis and correct of measuring film thickness with aes[J].Modern Instruments,2000(5):44-45,38. |
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| Authors: | Sheng Guo Yu |
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| Affiliation: | Sheng Guo Yu China Institute of metrology 310034 |
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| Abstract: | The paper introduce the principle and method of measuring film thickness with AES. The various errors in measuring are analyzed. And the correcting methods of the various errors are discussed. |
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| Keywords: | Film Thickness Error |
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