天光一号预放大器自动准直技术研究

天光一号高功率KrF准分子激光装置采用光学角多路实现了六束激光的主振荡功率放大，其光路复杂，人工调节繁琐，指向精度难以保证，且激光波长为248 nm，属于深紫外波段，无法采用常用的光束自动准直方法。为了保障六束激光聚焦叠加并稳定精准地照射到靶面上，需开展适合天光一号装置激光参数及光路特性的自动准直技术研究。本文以预放大器三束输入、输出光路为研究对象，探索适合天光一号装置的自动准直方法，建立了预放大器光路自动准直系统，实现了快速、高精度光束的调节，验证了自动准直方案的可行性，为天光一号KrF准分子激光装置实现全光路自动准直奠定了技术基础。

Study on Automatic Collimation Technology of Preamplifier for Heaven-Ⅰ

The angular multiplexing technology is used in the Heaven-Ⅰ high power KrF excimer laser facility to amplify the six short light pulses. The complex optical system results in wasting time and labor in the beam path adjusting and the high precision manual adjustment is very difficult. Because of its deep UV wavelength of 248 nm, the automatic collimation technology commonly used is not suitable for the Heaven-Ⅰ. In order to satisfy the requirement of the laser-matter interaction experiment, a new automatic collimation technology suitable for the Heaven-Ⅰ is necessary to be developed to improve the coincidence accuracy of the focal spot. In the paper, aiming at the three-beam propagation through the preamplifier, the automatic collimation technology suitable for Heaven-Ⅰ was studied and used in the three input and output laser beams of the preamplifier. The result shows that the automatic collimation system can realize the fast and high-precision adjustment, which sets up the technology foundation for automatic collimation of Heaven-Ⅰ high power KrF excimer laser facility.