| 基于光纤双波干涉的台阶高度在线高精度测量研究 |
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| 引用本文： | 马森,谢芳,王韵致,陈亮.基于光纤双波干涉的台阶高度在线高精度测量研究[J].光电子．激光,2014(9):1749-1753. |
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| 作者姓名： | 马森 谢芳 王韵致 陈亮 |
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| 作者单位： | 北京交通大学 理学院 物理系 光电检测研究所 ,北京 100044;北京交通大学 理学院 物理系 光电检测研究所 ,北京 100044;北京交通大学 理学院 物理系 光电检测研究所 ,北京 100044;北京交通大学 理学院 物理系 光电检测研究所 ,北京 100044 |
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| 基金项目： | 国家自然科学基金(50975022)和北京市自然科学基金(3132033)资助项目 (北京交通大学 理学院物理系 光电检测研究所 ,北京 100044) |
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| 摘 要： | 提出一种基于双波干涉的台阶高度光纤在线干涉测量系统。利用光纤光栅(FBG)只反射布拉格波长的特性,使两个波长同时并独立地工作于同一个光纤干涉测量系统中,每个波长的干涉信号分别并同时被探测,将测量量程扩大为半合成波波长。利用反馈电路补偿环境干扰对光纤干涉测量系统的影响,使光纤干涉测量系统适合于在线测量。本光纤干涉测量系统可测量的最大台阶高度达1mm,测量分辨率小于1nm。
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| 关 键 词： | 光纤测量 干涉测量 台阶高度测量 在线测量 |
| 收稿时间： | 2014/6/10 0:00:00 |
High precision on-line measurement of step height based on fiber dual-waveleng th interferometry |
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| Affiliation: | Laboratory for Optical Information Science and Technology,Department of Physics ,School of Sci ence,Beijing Jiaotong University,Beijing 100044,China;Laboratory for Optical Information Science and Technology,Department of Physics ,School of Sci ence,Beijing Jiaotong University,Beijing 100044,China;Laboratory for Optical Information Science and Technology,Department of Physics ,School of Sci ence,Beijing Jiaotong University,Beijing 100044,China;Laboratory for Optical Information Science and Technology,Department of Physics ,School of Sci ence,Beijing Jiaotong University,Beijing 100044,China |
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| Abstract: | An optical fiber dual-wavelength interferometric sys tem,which is suitable for on- line measurement of step heights with high precision and without the need of eac h wavelength working individually in sequence to perform the measurement,is proposed. By employing the characteristic of a fiber Bragg grating of reflecting Bragg wave length,two different wavelengths are working simultaneously and independently in the same optical fiber interferometric system,and two interfero metric signals of each wavelength can be detected simultaneously and respectively.The measurement range is expa nded to half of a synthetic wavelength. The system is stabilized by a feedback loop which compensates the influence ind uced by the environmental disturbances,and thus the system is robust enough for on -line measurement.The system is capable of measuring st ep heights as large as 1mm and the measurement resolution is less than 1nm. |
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| Keywords: | optical fiber measurement interferometry step height measurement on -line measurement |
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