电控可变焦128×128元自适应液晶微透镜阵列

借鉴已有的单圆孔电极液晶透镜的结构与设计方法，发展得到了新型的电控可变焦128×128元的液晶微透镜阵列。该面阵液晶微透镜使用ITO玻璃作为上下基板，其中上基板电极是将ITO膜通过光刻技术和盐酸腐蚀方法得到了128×128元圆孔阵列图案；而下电极基板就是ITO膜。上基板电极的圆孔阵列整齐的排列，每个圆孔的直径为50μm，圆孔之间的间隔为100μm。夹在上下基板之间的液晶层的厚度为20μm。该面阵液晶微透镜的特性为：在0.2VRMS～5.0 VRMS电压范围下，该面阵液晶微透镜的焦距范围为50μm～400μm。进一步的测试实验结果表明，该面阵液晶微透镜的点扩展函数近似于理论数值，并且该面阵液晶微透镜的工作电压与焦距是成反比例关系，以及该面阵液晶微透镜具有与传统制作的面阵微透镜一样的多重像成像效果。

Electrically driving and controlling adaptive 128 element×128 element liquid crystal micro-lens array with tunable focal length

A new electrically driving and controlling 128 element×128 element Liquid Crystal (LC) micro-lens array with tunable focal length is proposed based on the structure and design methods of a single circular hole electrode LC lens. The Indium Tin Oxide (ITO) glasses are used as the top and bottom substrates of the LC micro-lens array. The top electrode patterns containing 128 element×128 element are obtained by a lithography and a hydrochloric acid etching,in which every element is a single circular hole of 50 μm diameter and the distance between the two circular holes is 100 μm. The bottom electrode is just the ITO film. Furthermore, the thickness of LC layer between the top and the bottom electrodes is about 20 μm and the focal length of the LC micro-lens array can be electrically tuned from 50 μm to 400 μm under the operating voltage from 0.2 V (RMS) to 5.0 V(RMS). The result of the test indicates that the point spread function of the LC micro-lens array is close to the theory value,and the relationship of operating voltage and focal length is in an inverse proportion. These results show that the imaging characteristic of the LC micro-lens array can be comparable to those of the conventional optical micro-lens arrays.