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反应等离子喷涂TiN/AlN涂层的性能研究
引用本文:李晓亮,阎殿然,何继宁,董艳春,李香芝,张建新. 反应等离子喷涂TiN/AlN涂层的性能研究[J]. 新技术新工艺, 2006, 0(3): 85-86
作者姓名:李晓亮  阎殿然  何继宁  董艳春  李香芝  张建新
作者单位:河北工业大学材料科学与工程学院,300132
摘    要:TiN涂层可以通过传统的物理或者化学气相沉积(PVD及CVD)工艺制备,但其缺点是沉积速率低,涂层厚度过薄;这些都严重地限制了TiN涂层材料在磨、蚀服役条件下的应用.本文利用反应等离子喷涂的方法制备了TiN/AlN涂层并研究分析了涂层的组织及摩擦磨损性能.结果表明:TiN/AlN涂层韧性比TiN涂层有所提高;TiN/AlN涂层不仅有较低的摩擦系数,且在高载下的磨损性能比TiN涂层有较大的提高.

关 键 词:反应等离子喷涂  TiN/AlN复合涂层  韧性  磨损性能

Study on the Properties of TiN/AlN Coating by Reactive Plasma Spraying Process
Li XiaoLiang;Yan DianRan;He JiNing;Dong YanChun;Li XiangZhi;Zhang JianXin. Study on the Properties of TiN/AlN Coating by Reactive Plasma Spraying Process[J]. New Technology & New Process, 2006, 0(3): 85-86
Authors:Li XiaoLiang  Yan DianRan  He JiNing  Dong YanChun  Li XiangZhi  Zhang JianXin
Abstract:TiN films formed by traditional techniques are mostly thin and have poor wear- resisting property. In this paper, TIN/AlN compound coating was prepared by reactive plasma spraying process. The structure and wear properties of the coating were studied. The result shows that TiN/AIN coating has higher toughness, lower wear coefficient and higher wear resistance under high load than TiN coating.
Keywords:reactive plasma spray   TIN/AlN compound coating   toughness   wear property
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