| 激光高阶回馈微位移测量系统设计及误差分析 |
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| 引用本文： | 曾召利,屈学民,文峻,李维娜,张敏.激光高阶回馈微位移测量系统设计及误差分析[J].激光与红外,2015,45(5):487-491. |
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| 作者姓名： | 曾召利 屈学民 文峻 李维娜 张敏 |
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| 作者单位： | 第四军医大学生物医学工程系数理教研室,陕西 西安 710032 |
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| 基金项目： | 国家自然科学基金项目（No.61405247）资助 |
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| 摘 要： | 设计了一套基于激光高阶回馈效应的微位移测量系统,介绍了其工作原理,给出了系统中光学单元、机械单元和信号处理及细分单元的设计方法及关键参数。对设计完成的测量系统与PI位移台进行了比对测试,实验结果表明系统的分辨率达到0.7 nm,并对测量系统进行了误差分析。激光高阶回馈微位移测量系统不但分辨率高,而且还具有结构简单和性价比高等优点,在精密位移测量中具有广泛的应用前景。
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| 关 键 词： | 激光高阶回馈 微位移测量 误差分析 |
Design and error analysis of micro displacement measurement system based on laser high order feedback effect |
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| ZENG Zhao-li,QU Xue-min,WEN Jun,LI Wei-n,ZHANG Min.Design and error analysis of micro displacement measurement system based on laser high order feedback effect[J].Laser & Infrared,2015,45(5):487-491. |
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| Authors: | ZENG Zhao-li QU Xue-min WEN Jun LI Wei-n ZHANG Min |
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| Abstract: | A micro displacement measurement system based on laser high order feedback effect is designed,and its principle is introduced.Also,the key parameters of optical system,mechanical part and single process units are given.Then,comparison tests are carried out for laser high order feedback system and PI moving stage.Test results show that the system resolution is up to 0.7 nm,and the errors of measurement system are analyzed.Measurement system based on laser high order feedback effect has the advantages of high resolution,simple structure and high cost performance,which has broad application prospect in precision measurement field. |
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| Keywords: | laser high order feedback micro displacement measurement error analysis |
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