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长光栅传感器动态误差检测系统设计
引用本文:石照耀,尚岳,王笑一,刘建刚.长光栅传感器动态误差检测系统设计[J].北京工业大学学报,2016,42(3):321-328.
作者姓名:石照耀  尚岳  王笑一  刘建刚
作者单位:北京工业大学北京市精密测控技术与仪器工程技术研究中心,北京,100124;贵阳新豪光电有限公司,贵阳,550018
基金项目:贵州省科技厅重大专项(黔科合重大专项字[2012] 6020)
摘    要:长光栅传感器的静态精度的检测方法较为成熟,而其动态精度的检测尚没有一个有效的解决办法. 针对此问题,研制了一种以高精度光栅尺为基准的长光栅动态误差检测系统. 仪器主要由机械系统、测控系统、软件系统组成,通过在有效行程上与高精度光栅对比获得被测光栅的误差曲线. 仪器采用直线电机驱动,保证了检测速度的要求,同时提高了长光栅传感器的检测效率. 设计基于FPGA的双路光栅信号高速采集卡对光栅信号检测,解决了测量中同步触发问题及高速触发采样数据的处理问题. 结果表明:本系统能够实现对光栅的动态精度的检测,检测效率高,适用于生产现场的大批量快速测量.

关 键 词:光栅  动态误差  测量仪器

Design of the Dynamic Error Measurement System for Linear-encoders
SHI Zhaoyao,SHANG Yue,WANG Xiaoyi,LIU Jiangang.Design of the Dynamic Error Measurement System for Linear-encoders[J].Journal of Beijing Polytechnic University,2016,42(3):321-328.
Authors:SHI Zhaoyao  SHANG Yue  WANG Xiaoyi  LIU Jiangang
Abstract:Currently, methods for the linear-encoder's static error measurement are relatively mature but not the dynamic's error measurement. This paper presents a dynamic error measurement system to solve this problem. The system consists of mechanical system, control and measurement system, and software, and measurement can be accomplished by comparing with high precision linear-encoder. Driven by a linear motor, the demand of the speed was met, and the efficiency was improved. Bi-channel data acquisition card designed by FPGA could complete the measurement of the linear encoder signal, and solve the high speed sampling problems in the measurement. The result of experiments shows that the system can achieve the measurement of dynamic error for linear-encoders with a high efficiency, which is suitable for measurements in the factory.
Keywords:linear-encoder  dynamic error  measuring instrument
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