热气泡式微流体驱动器的研究进展

热气泡式微流体驱动器是微驱动的一个研究分支，是微流控器件的重要组成部分。热气泡式微流体驱动器没有机械可动部件和机械变形，结构简单、容易加工制造、可靠性高，在航空航天、生物医学和化学等领域具有广阔的应用前景。目前，热气泡式微流体驱动器主要采用4种加热方式：电阻加热、电磁感应加热、激光加热和电火花加热。对以上4种热气泡式微驱动器的研究进展进行了总结，分析了不同加热驱动方式的工作原理、结构组成、微加工制作方法、实验测试结果和驱动特点，并对今后热气泡式微驱动器的发展趋势及研究方法进行了分析。

Review of Thermal Bubble Micro-actuators for Micro-fluidics

Thermal bubble micro-actuator is one branch of MEMS actuators and is also an important driving method for micro-fluidics. There are no moveable mechanical parts and any mechanical deformation in the thermal bubble micro-actuator for micro-fluidics. Additionally, the structure of the thermal bubble micro-actuator is simple, and it is easily fabricated and has better reliability. Therefore, the thermal bubble micro-actuator has a broad prospect application in aerospace, biomedical, and chemical. Four heating methods are currently adopted by the thermal bubble micro-actuator for micro-fluidics. They are micro resistor heater, micro induction heater, laser heater, and spark heater. This paper summarizes the new researches of the micro-actuators for micro-fluidics with different heating methods. The principles, structures, micro fabrications, experimental results and characteristics of different micro-actuators studied recently are introduced. Then, the trend of development and research method of micro-actuators for micro-fluidics are also analyzed.