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A facility for measuring the thickness of thin metal films |
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| Authors: | Kh.?B.?Tolipov author-information" > author-information__contact u-icon-before" > mailto:thb@susu.ac.ru" title=" thb@susu.ac.ru" itemprop=" email" data-track=" click" data-track-action=" Email author" data-track-label=" " >Email author |
| Affiliation: | 1.South Ural State University,Chelyabinsk,Russia |
| Abstract: | A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy. |
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