| 大量程杠杆式光学轮廓仪的非线性分析与补偿 |
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| 引用本文： | 王选择,郭军,谢铁邦. 大量程杠杆式光学轮廓仪的非线性分析与补偿[J]. 传感器与微系统, 2003, 22(8): 38-41 |
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| 作者姓名： | 王选择 郭军 谢铁邦 |
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| 作者单位： | 1. 三峡大学,机械与材料学院,湖北,宜昌,443002
2. 华中科技大学,机械学院,湖北,武汉,430074 |
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| 基金项目： | 国家自然科学基金资助(69902006),西北工业大学"英才计划"资助 |
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| 摘 要： | 介绍了以角锥棱镜为目标镜的杠杆式光学轮廓仪的测量方法。应用矢量坐标变换的方法理论推导了在大量程范围内测量位移与光程差的非线性关系,给出了解析解与数值解。通过理论数值解曲线图的分析,提出了采用二阶拟合的补偿方法,求出了补偿后理论误差结果。以微动工作台为位移发生器,在5.2mm范围内,实验给出了轮廓仪的测量结果,并分别计算了测量结果的线性度误差与二阶拟合补偿后的误差。
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| 关 键 词： | 杠杆式光学轮廓仪 矢量坐标变换 非线性误差 二阶拟合 |
| 文章编号： | 1000-9787(2003)08-0038-04 |
| 修稿时间： | 2003-02-24 |
Nonlinear analysis and compensation of lever-type optical profilometer with large range |
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| WANG Xuan-ze,GUOJun,XIE Tie-bang. Nonlinear analysis and compensation of lever-type optical profilometer with large range[J]. Transducer and Microsystem Technology, 2003, 22(8): 38-41 |
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| Authors: | WANG Xuan-ze GUOJun XIE Tie-bang |
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| Affiliation: | WANG Xuan-ze~1,GUOJun~2,XIE Tie-bang~2 |
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| Abstract: | The measurement methods of lever-type optical profilometer with pyramid as its target mirror are introduced. The nonlinear relation between light travel distance and measured displacement is (deduced) by vector coordinate transforms, and their analytic and numerical results are given. Second-order polynomial to fit and compensate measured value is presented by analyzing the numerical curve graph. (The experiment) gives the measurement data in the range of 5.2 mm when taking micro-motion table as (displacement) generator, and the (linearity) error and compensate error of second-order fit are computed. |
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| Keywords: | lever-type optical profilometer vector coordinate transform nonlinear error second-order fit |
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