多弧离子镀负偏压对氮化钛薄膜的影响

目的确定适当的负偏压,提高多弧离子镀氮化钛薄膜的综合性能。方法采用不同的负偏压,在4Cr13不锈钢表面制备Ti N薄膜,探讨偏压对薄膜表面质量、结构、硬度、结合力和摩擦系数的影响。结果负偏压对薄膜表面质量的影响较大:负偏压为0 V时,Ti N薄膜表面凹凸不平,液滴较多;随着负偏压升高,薄膜表面变得光滑,液滴减少并变小,薄膜致密性也得到提高。在不同负偏压下,Ti N薄膜均呈现出在(111)晶面的择优取向,但随着负偏压的增大,这种择优取向逐渐减弱,当负偏压达到400 V时,薄膜在(220)晶面的峰值逐渐增强。随着负偏压从0增至400 V,薄膜的硬度、结合力和耐磨性均先提高,后降低。当负偏压为300 V时,薄膜的硬度和结合力达到最大,分别为2650HV和58 N;摩擦系数和磨损量最小,分别为0.48和0.1065 mm3。结论施加适当的负偏压可以提高薄膜的硬度、结合力、耐磨性等性能,当负偏压为300 V时,薄膜的各项性能达到最佳。

Influence of Negative Bias on TiN Film Deposited by Multi-arc Ion Plating

Objective In order to improve the comprehensive performance of TiN coatings, the appropriate negative bias was in-vestigated. Methods TiN coatings were deposited with different negative bias voltage on the surface of 4Cr13 stainless steel, and the effect of negative bias voltage on the surface quality, microstructure, hardness, binding force and friction coefficient of the coa-tings was investigated. Results The results showed that negative bias voltage had an obvious influence on the surface quality of the TiN coating. When the negative bias voltage was 0 V, there were many droplets, larger particles and a few pits. With the increase of the bias voltage, the number and size of droplets on the film surface were reduced, and the coatings surface became smooth and more compact. TiN films deposited at different bias voltage all showed preferred orientation in (111) crystal plane, but with the increase of bias voltage, the preferred orientation gradually diminished, when the bias voltage was 400 V, the peak value of the film on the (220) crystal plane was gradually strengthened. When the bias voltage changed between 0 V and 400 V, the hardness, fording force and abrasion resistance of coatings first increased and then decreased. When the bias voltage was 300 V, the biggest hardness and fording force reached 2650HV and 58 N, respectively;The friction coefficient and abrasion loss were 0. 48 and 0. 1065 mm3 , respec-tively. Conclusion Applying proper negative bias voltage could improve the comprehensive properties of coatings, such as hardness, fording force and abrasion resistance. When the bias voltage was 300 V, the TiN film deposited showed the best properties.