| EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING |
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| 引用本文： | CHEN Erbao East China Institute of Metallurgy,Maanshan,Anhui Associate Professor,Department of Metallurgical Engineering,East China Institute of Metallurgy,Maanshan,Anhui 243002,China. EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING[J]. 金属学报(英文版), 1992, 5(9): 190-193 |
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| 作者姓名： | CHEN Erbao East China Institute of Metallurgy Maanshan Anhui Associate Professor Department of Metallurgical Engineering East China Institute of Metallurgy Maanshan Anhui 243002 China |
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| 作者单位： | CHEN Erbao East China Institute of Metallurgy，Maanshan，Anhui Associate Professor，Department of Metallurgical Engineering，East China Institute of Metallurgy，Maanshan，Anhui 243002，China |
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| 摘 要： | Effect of carbon content of steel substrate,on the chemical vapour deposition(CVD)ofTiN has been investigated.The increment of deposition rate is linearly related to the increaseof carbon content in own substrate.The α-Fe peak,besides TiN,is revealed in X-raydiffraction pattern of TiN coating.The(220)preferred growth of TiN deposited on steelCr12MoV substrate increases with the increase of depositing temperature.Only Ti energyspectrum was found from the bright region at coating surface and the interior,while bothTi and Fe energy spectra from dark region.
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| 收稿时间： | 1992-09-11 |
| 修稿时间： | 1992-09-11 |
EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING |
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| CHEN Erbao East China Institute of Metallurgy,Maanshan,Anhui Associate Professor. EFFECT OF CARBON CONTENT IN SUBSTRATE ON CVD TiN COATING[J]. Acta Metallurgica Sinica(English Letters), 1992, 5(9): 190-193 |
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| Authors: | CHEN Erbao East China Institute of Metallurgy Maanshan Anhui Associate Professor |
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| Affiliation: | CHEN Erbao East China Institute of Metallurgy,Maanshan,Anhui Associate Professor,Department of Metallurgical Engineering,East China Institute of Metallurgy,Maanshan,Anhui,China |
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| Abstract: | Effect of carbon content of steel substrate,on the chemical vapour deposition(CVD)of TiN has been investigated.The increment of deposition rate is linearly related to the increase of carbon content in own substrate.The α-Fe peak,besides TiN,is revealed in X-ray diffraction pattern of TiN coating.The(220)preferred growth of TiN deposited on steel Cr12MoV substrate increases with the increase of depositing temperature.Only Ti energy spectrum was found from the bright region at coating surface and the interior,while both Ti and Fe energy spectra from dark region. |
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| Keywords: | TiN chemical vapour deposition coating |
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