超精密装置二维F-PID振动控制系统设计

在模拟啄木鸟头部独特生物构造和隔振机理的基础上，采用主动隔振和被动隔振相结合的技术建立了超精密装置隔振系统结构及动力学模型。结合超精密装置隔振系统的结构特点和性能要求，提出了带有两个修正因子的闭环二维F—PID主动控制系统，即根据输入位移和速度的信号偏差大小分别采用不同的修正因子，并采用Matlab软件进行了仿真分析。仿真分析结果表明，该振动控制系统在0—100Hz频率范围内具有良好的减振效果，可用于超精密测量、制造设备的隔振。

Design of Two-Dimension Fuzzy-PID Vibration Control System for Ultra-precision Device

To keep the ultra--precision device fromthe micro--disturbances of environment, a structure andkinetic model of a vibration control system are establishedwith a passive air--spring which may reduces vibrationsin high--frequency area and a giant magnetostrictive actu-ator which may reduce those in low--frequency area, thisis imitative of the isolation mechanics and special organictexture of woodpecker's brain. In consideration of com-plex vibration environment and nonlinear ultra--precisiondevice, a closed loop fuzzy--PID active control systemwith two modification factors is adopted, which are ad-justed according to the deviant of displacement and veloci-ty. The system is simulated by Matlab. Results of simu-lations show that the control system can effectively re-strain the disturbances whose frequency range form OHzto 100Hz. It can be applied to the vibration isolation fieldof the ultra--precision measuring and manufacturing de-vice.