Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range |
| |
Authors: | Imazono Takashi Koike Masato Kawachi Tetsuya Hasegawa Noboru Koeda Masaru Nagano Tetsuya Sasai Hiroyuki Oue Yuki Yonezawa Zeno Kuramoto Satoshi Terauchi Masami Takahashi Hideyuki Handa Nobuo Murano Takanori Sano Kazuo |
| |
Affiliation: | Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kizugawa, Kyoto, Japan. imazono.takashi@jaea.go.jp |
| |
Abstract: | Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (~55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|