| 电弧侧面金刚石薄膜的沉积 |
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| 引用本文： | 王守国,邬钦崇. 电弧侧面金刚石薄膜的沉积[J]. 真空与低温, 1998, 4(4): 217-219 |
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| 作者姓名： | 王守国 邬钦崇 |
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| 作者单位： | 山东大学物理系，中国科学院等离子体物理研究所 |
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| 摘 要： | 利用磁约束直流等离子体炬设备和Ａｒ＋Ｈ２＋ＣＨ４混合气体，在喷出的电弧侧面的无水冷的ＡｌＮ（氮化铝陶瓷）衬底上，成功的制备出金刚石薄膜。使用扫描电子显微镜、Ｘ射线衍射仪和Ｒａｍａｎ光谱研究了金刚石薄膜形貌、生长速率及质量。
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| 关 键 词： | 金刚石膜，沉积，磁约束 |
DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET |
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| Wang Shouguo. DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET[J]. Vacuum and Cryogenics, 1998, 4(4): 217-219 |
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| Authors: | Wang Shouguo |
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| Abstract: | Diamond films were synthesized by using a magnetized DC plasma jet with argon(Ar),hydrogen(H 2) and methane(CH 4) on AlN substrate without water cooling.The feature,growth rate and quality of the films were studied by scanning elactron microscopy,X ray diffration and Raman spectroscopy. |
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| Keywords: | diamond films synthesis magnetied |
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