基于磁脉冲压缩的DBD高频双极性纳秒脉冲发生器的设计及其放电特性

作为高压高重复频率脉冲电压发生器的开关器件,磁开关的耐压、通流能力以及寿命远高于半导体开关,因而适用作为介质阻挡放电(DBD)激励电源的开关。为研究双极性高频下DBD等离子体放电特性,提出高频双极性磁脉冲压缩系统。首先,阐释通过全桥逆变电路、脉冲变压器和磁开关产生双极性脉冲的原理,并叙述该系统关键器件的设计;其次,利用PSpice仿真软件研究电路关键参数对输出波形的影响规律,测试电阻性负载电压波形,并与仿真结果进行对比分析。测试结果表明,通过双极性磁脉冲压缩系统,能够在负载两端输出的纳秒脉冲电压具有以下参数:幅值在5~13k V可调,上升沿100ns左右,重复频率可高至几千Hz。最后,针对高频双极性下的放电现象进行研究,结合DBD放电模型和放电图片探索高频双极性脉冲电压下放电特性与频率的关系,充实了高频放电理论研究。

Design of DBD High-Frequency Bipolar Nanosecond Pulse Generator Based on Magnetic Pulse Compression System and Its Discharging Characteristics

When the magnetic switch is used as a switch device of high voltage and high repetition frequency pulse voltage generator, its voltage tolerance and current capacity are much higher than those of the semiconductor switch. The magnetic switch is suitable for switching as a DBD excitation power supply. To study the characteristics of bipolar high frequency DBD plasma, a high frequency bipolar magnetic pulse compression system is proposed. First, this paper explains the principle of bipolar pulse generated by the full bridge inverter circuit, pulse transformer and magnetic switch. The design of key components is then described. Second, the influence of key parameters in circuit on the output waveform is studied using PSpice software. The resistive load voltage waveform is tested and compared with the simulation results. As a result, the nanosecond pulse generator produces a pulse on a resistor, where the amplitude in 5~13kV adjustable, the rising time of about 100ns, therepetition frequency of 0 to several kHz. Finally, this paper studies the plasma characteristics under high frequency bipolar pulse. Combined with discharge photos and theoretical calculation, the relationship between the discharge characteristics and frequency is explored, which enriches the theoretical study of high frequency bipolar discharge.