Morphological properties of sputtered MoS2 films |
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| Authors: | V. Buck |
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| Affiliation: | Lubricants and Tribology Branch, Institute for Technical Physics, Deutsche Forschungs-und Versuchsanstalt für Luft-und Raumfahrt (DFVLR), 7000 Stuttgart 80 F.R.G. |
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| Abstract: | As the lubricating properties of MoS2 are due to the sliding of lamellae, the crystallographic orientation and structural properties of these lamellae are important for the tribological behaviour. Thus an analysis of the growth morphology of sputtered MoS2 films was carried out. It is shown that morphological properties can be influenced by the parameters of the deposition process; in particular, it is possible to prepare coatings in which the lamellae are oriented parallel to each other. |
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