Wideband, Low Driving Voltage Traveling-Wave Mach–Zehnder Modulator for RF Photonics

We report the design, fabrication, and testing of a traveling-wave Mach-Zehnder modulator on a GaAs substrate. Operating at 870-nm wavelength, we obtained an extremely low driving voltage of 0.45 V and a high measurement-instrument-limited small-signal modulation bandwidth of 18 GHz, projected to an estimated bandwidth of 50 GHz. We have also monolithically integrated photodetectors with an impulse response of 8-ps full-width at half-maximum, and a saturation power of 330 mW, giving a flexible high-performance platform for RF photonics.