| 用能谱技术确定基体薄涂层的厚度 |
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| 引用本文： | 冯显灿,张人佶.用能谱技术确定基体薄涂层的厚度[J].理化检验(物理分册),1999,35(7):310-313. |
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| 作者姓名： | 冯显灿 张人佶 |
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| 作者单位： | [1]广州师范学院物理系 [2]清华大学机械工程系 |
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| 摘 要： | 提出一种不同标样确定基体薄涂层厚度并同时得到薄膜成分的新方法。通过理论计算，得 不同涂层厚度下，涂层与基体的特征Ｘ射线相对强度比Ｉｃ／Ｉｓ并作出理论曲线；然后用能谱技术测出Ｉｃ／Ｉｓ，可由理论曲线得出相应的涂层厚度。经实验证明该方法可行
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| 关 键 词： | 能谱技术 薄涂层 厚度 薄膜成分 |
THICKNESS DETERMINATION OF THIN COATING ON SUBSTRATE USING ENERGY DISPERSIVE SPECTROSCOPY TECHNIQUE |
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| Feng Xiancan,Zhang Renji.THICKNESS DETERMINATION OF THIN COATING ON SUBSTRATE USING ENERGY DISPERSIVE SPECTROSCOPY TECHNIQUE[J].Physical Testing and Chemical Analysis Part A:Physical Testing,1999,35(7):310-313. |
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| Authors: | Feng Xiancan Zhang Renji |
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| Affiliation: | Feng Xiancan Zhang RenjiDepartment of Physics,Guangzhou Normal University Department of Mechanical Engineering,Tsinghua University |
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| Abstract: | We give a new standardless method for thickness determination of thin coating on substrate in this paper: by means of direct calculation of characteristic X-ray intensities from the thin coating and the sub-strate, a set of relative ratios of IC/I_s are obtained for a given set of coating thickness, and theoretical curve is made. Then the same kind of coating which has unknown thickness could be determined by measuring I_c/I_s using EDS. It was proved by comparison between the curve that proposed method is suitable. The advantage of this method is not using coating and substrate standards, while retaining the advantage of high spatial resolution char-acteristics of SEM and getting the compositions of the thin coating at same time. |
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| Keywords: | EDS Thin coating Thickness |
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