| 光谱式MEMS/CMOS兼容气敏传感器 |
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| 引用本文： | 高超群,焦斌斌,刘茂哲,李全宝,杨锴,石莎莉,李志刚,欧毅,景玉鹏,陈大鹏.光谱式MEMS/CMOS兼容气敏传感器[J].半导体学报,2008,29(10):2043-2049. |
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| 作者姓名： | 高超群 焦斌斌 刘茂哲 李全宝 杨锴 石莎莉 李志刚 欧毅 景玉鹏 陈大鹏 |
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| 作者单位： | 中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029;中国科学院微电子研究所,北京,100029 |
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| 摘 要： | 光谱技术是化学分析的终极手段. 将光谱技术与MEMS (micro-electro-mechanical systems）和CMOS技术结合是解决当前气敏传感器灵敏度低、选择性差、体积大、功耗高、不便于阵列化和高度集成以至于无梯度立体矢量探测能力等问题的有效手段. 本文介绍了一种制作于（110）硅片上的集成光谱式MEMS/CMOS兼容气敏传感器，详述了该气敏传感器的工作原理、传感器结构和制造工艺.
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| 关 键 词： | MEMS 气敏传感器 光谱分析 |
| 收稿时间： | 3/21/2008 9:21:49 AM |
| 修稿时间： | 4/22/2008 4:34:28 PM |
MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis |
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| Gao Chaoqun,Jiao Binbin,Liu Maozhe,Li Quanbao,Yang Kai,Shi Shali,Li Zhigang,Ou Yi,Jing Yupeng and Chen Dapeng.MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J].Chinese Journal of Semiconductors,2008,29(10):2043-2049. |
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| Authors: | Gao Chaoqun Jiao Binbin Liu Maozhe Li Quanbao Yang Kai Shi Shali Li Zhigang Ou Yi Jing Yupeng and Chen Dapeng |
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| Affiliation: | Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China |
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| Abstract: | A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis,which is fabricated on a (110) silicon wafer,is proposed.Its main principle,structure,and fabrications are introduced in detail.The gas sensor gains high sensitivity and selectivity but has low power consumption,and it should detect the grads of gas concentration for the mentioned advantages. |
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| Keywords: | MEMS gas sensor spectroscopy analysis |
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