| 基于MEMS的力传感器薄膜应变计加工工艺 |
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| 引用本文： | 王嘉力,高晓辉,姜力,刘宏. 基于MEMS的力传感器薄膜应变计加工工艺[J]. 微细加工技术, 2006, 0(1): 52-55 |
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| 作者姓名： | 王嘉力 高晓辉 姜力 刘宏 |
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| 作者单位： | 哈尔滨工业大学,机器人研究所,哈尔滨,150001 |
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| 基金项目： | 中国科学院资助项目;国家科技攻关项目 |
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| 摘 要： | 提出了在铝合金基体上磁控溅射80Ni20Cr薄膜电阻应变计的加工工艺,说明了其工艺的实现步骤。采用低弹性模量的铝合金制作力传感器的弹性体可以提高力/力矩传感器的灵敏度。提出了一种适合MEMS加工的全平面的力/力矩传感器弹性体结构。并介绍了薄膜电阻应变计构成的微型六维力传感器和薄膜厚度的测量手段。通过实验证实,此种薄膜工艺的应用提高了力传感器的测量精度。
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| 关 键 词： | 薄膜 应变计 力传感器 |
| 文章编号： | 1003-8213(2006)01-0052-04 |
| 修稿时间： | 2005-06-26 |
The Fabrication Processes of Force Sensor''''s Thin Film Strain Gauges Based on MEMS |
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| WANG Jia-li,GAO Xiao-hui,JIANG Li,LIU Hong. The Fabrication Processes of Force Sensor''''s Thin Film Strain Gauges Based on MEMS[J]. Microfabrication Technology, 2006, 0(1): 52-55 |
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| Authors: | WANG Jia-li GAO Xiao-hui JIANG Li LIU Hong |
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| Abstract: | The feasibility processes of magnetron sputtering the 80Ni20Cr thin film strain gages on the aluminum alloy(2024) target is presented and illustrated.Taking aluminum alloy with low modulus of elasticity as the material for the force sensor's sensing element can improve the sensitivity of the sensor.A monolithic disk-shaped sensing element,which is fit for MEMS processing is proposed.Otherwise,the micro six axis force sensor base on the thin film strain gauges and the testing methods of the thickness of the thin film can are illustrated.Experiments revealed that the thin film can improve the overall precision of the force sensor. |
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| Keywords: | MEMS |
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