Micro‐Supercapacitors Based on Interdigital Electrodes of Reduced Graphene Oxide and Carbon Nanotube Composites with Ultrahigh Power Handling Performance

A novel method for fabricating micro‐patterned interdigitated electrodes based on reduced graphene oxide (rGO) and carbon nanotube (CNT) composites for ultra‐high power handling micro‐supercapacitor application is reported. The binder‐free microelectrodes were developed by combining electrostatic spray deposition (ESD) and photolithography lift‐off methods. Without typically used thermal or chemical reduction, GO sheets are readily reduced to rGO during the ESD deposition. Electrochemical measurements show that the in‐plane interdigital design of the microelectrodes is effective in increasing accessibility of electrolyte ions in‐between stacked rGO sheets through an electro‐activation process. Addition of CNTs results in reduced restacking of rGO sheets and improved energy and power density. Cyclic voltammetry (CV) measurements show that the specific capacitance of the micro‐supercapacitor based on rGO–CNT composites is 6.1 mF cm^?2 at 0.01 V s^?1. At a very high scan rate of 50 V s^?1, a specific capacitance of 2.8 mF cm^?2 (stack capacitance of 3.1 F cm^?3) is recorded, which is an unprecedented performance for supercapacitors. The addition of CNT, electrolyte‐accessible and binder‐free microelectrodes, as well as an interdigitated in‐plane design result in a high‐frequency response of the micro‐supercapacitors with resistive‐capacitive time constants as low as 4.8 ms. These characteristics suggest that interdigitated rGO–CNT composite electrodes are promising for on‐chip energy storage application with high power demands.