| 微型光机电系统及其制作 |
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| 引用本文： | 白立芬,李庆祥,薛实福,于水.微型光机电系统及其制作[J].电子工业专用设备,2000,29(3):1-7,12. |
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| 作者姓名： | 白立芬 李庆祥 薛实福 于水 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084 |
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| 基金项目： | 国家重点基础研究项目!(G19990 3— 0 7) |
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| 摘 要： | 微型光机电系统 (MOEMS)是将微光学、微电子和微机械系统结合发展出一种新型、宽广的应用领域 ,从早期的分立光学元件与电子电路向独立完整的光学系统发展。阐述了实现MOEMS的 2种技术手段 :光波导和微型光学平台的原理、制作工艺和关键技术 ,在此基础上概要介绍了几种典型的MOEMS系统。最后对其的发展作了展望。
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| 关 键 词： | 微型光机电系统 制作 集成电路工艺 |
| 文章编号： | 1004-4507(2000)03-0001-07 |
Micro-Opto-Electro-Mechanical System and It's Fabrication |
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| Bai Li-fen,Li Qing-xiang,Xue Shi-fu,Yu Shui.Micro-Opto-Electro-Mechanical System and It's Fabrication[J].Equipment for Electronic Products Marufacturing,2000,29(3):1-7,12. |
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| Authors: | Bai Li-fen Li Qing-xiang Xue Shi-fu Yu Shui |
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| Affiliation: | Bai Li-fen
,Li Qing-xiang
,Xue Shi-fu
,Yu Shui
(Department of Precision Instrument and Mechanology,Tsinghua University,Beijing 100084,China) |
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| Abstract: | Micro?Opto?Electro?Mechanical System(MOEMS)is a novel and broader class of device,which merges micro?optics,microelectronics,and micro?mechanics together.Micro?optical elements were hybridized with electronic circuit in the first generation and miniaturized optical systems also advanced to nearly complete monolithic systems as microelectronic technology advanced.In this paper,the principle,fabrication process and some key technologies of optical guide and micro optical bench,which are two main technical means to achieve MOEM system,are expounded and some typical MOME systems are introduced too.Finally give a vista for MOEMS. |
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| Keywords: | Micro?Opto?Electro?Mechanical System fabrication IC process |
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