Morphology-controlled fabrication of nanostructured WO3 thin films by magnetron sputtering with glancing angle deposition for enhanced efficiency photo-electrochemical water splitting |
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| Affiliation: | 1. Energy Technology Program, School of Energy, Environment and Materials, King Mongkut''s University of Technology Thonburi, 126 Pracha Uthit Rd., Bang Mod, Thung Khru, Bangkok, 10140, Thailand;2. Department of Chemistry, Faculty of Science and Technology, Rajamangala University of Technology Thanyaburi, Pathum Thani, 12110, Thailand;3. Advanced Materials Design and Development (AMDD) Research Unit, Faculty of Science and Technology, Rajamangala University of Technology Thanyaburi, Pathum Thani, 12110, Thailand;4. Synchrotron Light Research Institute, Maung, Nakhon Ratchasima, 30000, Thailand;5. Opto-Electrochemical Sensing Research Team, Spectroscopic and Sensing Devices Research Group, National Electronics and Computer Technology Center, Pathum Thani, 12120, Thailand;6. Anhui Provincial Key Laboratory of Photonic Devices and Materials, Anhui Institute of Optics and Fine Mechanics, And Key Lab of Photovoltaic and Energy Conservation Materials, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei, 230031, China |
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| Abstract: | Herein, the tungsten trioxide (WO3) nanostructure thin films with different morphologies are firstly fabricated by magnetron sputtering with glancing angle deposition technique (MS-GLAD), followed by the post annealed treatment process in air ambient for 2 h. It is demonstrated that the geometry of MS-GLAD setup, mainly substrate position, played a crucial role in determining the morphology, crystallinity, optical transmittance, and photo-electrochemical (PEC) performance of the WO3 nanostructured thin film. With the different substrate positions in the MS-GLAD system, the WO3 nanorod film layer could be precisely changed to combine an underlying dense layer with a nanorod layer and then nanocolumnar film. Moreover, the prepared samples' chemical composition and work function are studied by X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS), respectively. The combining WO3 nanostructure produced high PEC efficiency compared to the single layer of the WO3 nanorods sample and the dense WO3 thin film sample. Thus, morphology-controlled nanostructure film based on the MS-GLAD technique in our study provides a simple approach to enhance the photo-anode for PEC water splitting application. |
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| Keywords: | GLAD Magnetron sputtering PEC Nanostructure |
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