| 反磁悬浮涡流旋转微陀螺的定子研究 |
| |
| 引用本文： | 刘凯,张卫平,陈文元,刘武,李凯,戴福彦.反磁悬浮涡流旋转微陀螺的定子研究[J].微细加工技术,2008(6). |
| |
| 作者姓名： | 刘凯 张卫平 陈文元 刘武 李凯 戴福彦 |
| |
| 作者单位： | 微米/纳米加工国防实验室,上海,200030;上海交通大学微纳科学技术研究院薄膜与微细加工教育部重点实验室 |
| |
| 基金项目： | 国家自然科学基金，国防预研项目 |
| |
| 摘 要： | 介绍的一种反磁悬浮涡流旋转微陀螺的定子研究.利用现有实验设备,通过多次实验摸索,找到了一条实现反磁悬浮涡流旋转微陀螺下定子合理的工艺路径,并进行了测试,测试显示定子结构完整正常.
|
| 关 键 词： | 微陀螺 反磁悬浮 涡流旋转 下定子工艺 |
Microgyroscope Stator with Diamagnetic Levitation and Eddy Current Rotation |
| |
| LIU Kai,ZHANG Wei-ping,CHEN Wen-yuan,LIU Wu,LI Kai,DAI Fu-yan.Microgyroscope Stator with Diamagnetic Levitation and Eddy Current Rotation[J].Microfabrication Technology,2008(6). |
| |
| Authors: | LIU Kai ZHANG Wei-ping CHEN Wen-yuan LIU Wu LI Kai DAI Fu-yan |
| |
| Affiliation: | LIU Kai,ZHANG Wei-ping,CHEN Wen-yuan,LIU Wu,LI Kai,DAI Fu-yan(Key Laboratory of Thin Film , Micro Fabrication Technology,Key Laboratory of StateDenfence Micro-NanoFabrication,Research Institute of Micro-Nano Technology,Shanghai Jiaotong University,Shanghai 200030,China) |
| |
| Abstract: | A microgyroscope stator with diamagnetic levitation and eddy current rotation was presented.Using present laboratory equipments,the author finds a appropriate way to manufacture the gyroscope bottom stator through several tries was found.Finally,the testing experiment of the stator shows that the structure is absolutely perfect. |
| |
| Keywords: | microgyroscope diamagnetic levitation eddy current rotation bottom stator process |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
