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MEMS微型燃料电池及其基于压电风扇的换气方法
引用本文:杨兴,周兆英,叶雄英,王晓浩. MEMS微型燃料电池及其基于压电风扇的换气方法[J]. 微纳电子技术, 2003, 0(Z1)
作者姓名:杨兴  周兆英  叶雄英  王晓浩
作者单位:清华大学精密仪器与机械学系微系统与控制研究室 北京100084(杨兴,周兆英,叶雄英),清华大学精密仪器与机械学系微系统与控制研究室 北京100084(王晓浩)
摘    要:介绍了基于MEMS的微型燃料电池的国内外研究动态 ,对其技术关键进行了阐述。在此基础上 ,对微型燃料电池的换气方法进行了研究。提出一种低功耗、体积小的压电风扇 ,对其力学模型进行了分析 ,并进行了风速、振幅、功耗等方面的实验研究 ,初步证明其应用于微型燃料电池换气的可行性

关 键 词:微型燃料电池  换气方法  压电风扇  MEMS

MEMS-based micro fuel cell and its air supplying method by piezoelectric fan
YANG Xing,ZHOU Zhao ying,YE Xiong ying,WANG Xiao hao. MEMS-based micro fuel cell and its air supplying method by piezoelectric fan[J]. Micronanoelectronic Technology, 2003, 0(Z1)
Authors:YANG Xing  ZHOU Zhao ying  YE Xiong ying  WANG Xiao hao
Abstract:The research progress of MEMS based micro fuel cell in the world is presented. Some key technologies are expounded. Based on these, the air supplying techniques which are used in micro direct methanol fuel cell were studied. A piezoelectric fan used in active air supplying with characteristics of low power consumption and small size was presented. Its mechanics model was analyzed and experiments on wind velocity, amplitude, power consumption were carried out. The experiments results initiatively demonstrate that it should be possible that this method is used for air supplying in micro fuel cell.
Keywords:micro fuel cell  air supplying  piezoelectric fan  MEMS
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