以四氯化硅水热法合成高纯微米级石英晶体

采用水热法，以多晶硅副产物四氯化硅为原料，碳酸钠为矿化剂，研究了不同温度下石英晶体的合成。并利用X射线衍射仪（XRD）、扫描电镜（SEM）和能谱仪（EDS）对其物相结构、形貌和成分进行了表征。结果表明，合成的石英晶体为典型的低温α-石英，呈棱柱状轴向生长；随着温度的升高，晶粒尺寸逐渐增大，在220 ℃下制备得到的晶粒最大，平均粒径为8 μm左右；但当温度为230 ℃时，制备的石英晶体的晶粒反而变小。

Synthesis of high purity micron-sized quartz from SiCl4 by hydrothermal method

Quartz crystal was synthesized from silicon tetrachloride of polysilicon by-product by hydrothermal method with anhydrous sodium carbonate as mineralizer at different reaction temperatures.XRD，SEM，and EDS were used to characterize the structure，morphology，and chemical components of the as-prepared quartz crystals.Results showed that the crystal phase of the as-prepared quartz was typical low-temperature α-SiO₂，which was prismatic and grew in the direction of axial；the size of quartz crystal increased gradually with the increasing of reaction temperature，appeared to have the maximum size at 220 ℃，and average particle size was about 8 μm；but when reaction temperature reached 230 ℃，the size of α-SiO₂ crystal became smaller.