硬质涂层的研究热点及面临问题

硬质涂层的制备及改性是当今涂层领域的研究热点之一,随着科学技术的迅速发展及工业要求的不断提高,对硬质涂层材料、性能及其制备技术则提出了更高的要求。本文主要从硬质涂层制备、组元微结构设计及其强化/退化机理、高性能硬质涂层三方面展开,介绍了硬质涂层领域的一些热点研究方向及其目前存在的问题。主要包括以下内容:发展新的沉积系统和涂层制备新技术,实现一些硬质涂层的低温沉积、低压沉积和高速率沉积,以及亚稳相的制备等;基于对Veprek制备的nc-TmN/a-Si₃N₄纳米复合涂层结构模型和理论解释的质疑,提出纳米晶/非晶复合涂层的研究重点;对比了氧元素在不同的涂层体系中所扮演的角色及其作用机制;总结了低应力厚硬质涂层的结构设计方法、对应机理及存在问题;归纳了一些高性能硬质涂层所需要具备的性能特点及实现方法,如高韧性、高抗裂纹扩展能力涂层,高热稳定性、抗氧化性涂层,超硬耐磨自润滑硼化物涂层。

Latest Development in Synthesis and Modification of Hard Coatings

The latest progress in synthesis and modification of hard coatings was tentatively reviewed. The discussions, on hot-spot subjects with specific examples, highlighted on:i) novel techniques to synthesize hard coatings at high deposition rate, low temperature and pressure, including but not limited to high power impulse magnetron sputtering, physical vapor deposition, filtered cathodic arc deposition and magnetron sputtering; ii) design of microstructures, growth of amorphous/nano-structured composite coatings, such as nc-TiN/a-Si₃N₄/nc-TiSi₂ coatings, properties modification by removal or doping of oxygen; and iii) exploration in deposition of advanced hard coatings, including films with high tenacity and strong crack extension resistance, films with high thermal stability and strong oxidation resistance, and films of metal boride with super-hardness and self-lubrication capability. Moreover, the development trends, existing problems, possible solutions and mechanisms, were also briefly discussed in a though provoking way.