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TiO2光诱导制备超小绒面太阳电池的性能
引用本文:林阳,高云,贾锐,李昊峰,窦丙飞,金智,刘新宇,叶甜春.TiO2光诱导制备超小绒面太阳电池的性能[J].硅酸盐学报,2012,40(7):1036-1039.
作者姓名:林阳  高云  贾锐  李昊峰  窦丙飞  金智  刘新宇  叶甜春
作者单位:1. 中国科学研究院微电子研究所,北京100029 湖北大学材料科学与工程学院,武汉430062
2. 湖北大学材料科学与工程学院,武汉,430062
3. 中国科学研究院微电子研究所,北京,100029
基金项目:国家自然科学基金,中科院院方向性项目,湖北省科委项目
摘    要:介绍了一种新型 TiO2光诱导制备超小绒面的方法。结果表示,在光照条件下利用 TiO2的光催化特性加快了腐蚀液与 Si 的反应速度,使得表面反射率能够由原来的 30%降低为现在的 5%,提高了陷光作用。该方法制备的太阳电池表面复合现象仍然较为严重,但有所改善。在最终的太阳电池上开路电压 Voc和短路电流密度 Jsc都有较为明显的提高。同时也证明了利用 TiO2同样可以在高阻的抛光 Si 源片上制备出较为均匀的绒面,虽然 TiO2光诱导制备的超小绒面没有 Ag 诱导的纳米柱绒面那么低的反射率,但是避免了引进金属杂质等问题。因此,TiO2光诱导制绒作为制备超小绒面太阳电池的新方法有着良好的发展前景。

关 键 词:二氧化钛  超小绒面  太阳电池

Solar Cells with Ultra-small Surface Textures Fabricated by Light-induced TiO2 Etching
LIN Yang,GAO Yun,JIA Rui,LI Haofeng,DOU Bingfei,JIN Zhi,LIU Xingyu,YE Tianchun.Solar Cells with Ultra-small Surface Textures Fabricated by Light-induced TiO2 Etching[J].Journal of The Chinese Ceramic Society,2012,40(7):1036-1039.
Authors:LIN Yang  GAO Yun  JIA Rui  LI Haofeng  DOU Bingfei  JIN Zhi  LIU Xingyu  YE Tianchun
Affiliation:1(1.Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;2.Faculty of Materials Science & Engineering,Hubei University,Wuhan 430062,China)
Abstract:In this paper,a new method for preparation of solar cells with ultra-small surface textures by means of light-induced TiO2 etching is introduced.When exposed to light,Si with TiO2 spinned-on etchs faster than naked Si as a result of the photocatalytic effect of TiO2.The reflection rate of Si with TiO2 spinned-on is only 5%,which is much lower than the 30% for the naked Si without etched.The presence of TiO2 also reduces the damages of the corrosive solution to the surface of Si,which achieves lower recombination rate as compared with conventional ultra-small textured solar cells.Moreover,parameters such as open circuit voltage(Voc) and short cir-cuit current density(Jsc) for cells textured with the help of TiO2 are higher than those without TiO2.Uniform textures will be obtained for Si wafers with high resistivity with TiO2 as catalyzer.Results also show that TiO2 is better than Ag in Si surface texturing,as TiO2 avoids the metal residual encountered in Ag-catalytic etching.
Keywords:titanium oxide  ultra-small surface  solar cell
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