| 激光微细熔覆柔性直写厚膜电阻和电极结合行为的研究 |
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| 引用本文： | 李慧玲,曾晓雁,李惠芬.激光微细熔覆柔性直写厚膜电阻和电极结合行为的研究[J].激光与光电子学进展,2005,42(2):48-51. |
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| 作者姓名： | 李慧玲 曾晓雁 李惠芬 |
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| 作者单位： | 1. 华中科技大学激光技术国家重点实验室,武汉,430074
2. Department of Industrial and System Engineering,The Hong Kong Polytechnic University HungHom,Kowloon,Hong Kong |
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| 基金项目： | 国家863高新技术(2001AA421290)，国家自然科学基金(50075030)资助课题 |
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| 摘 要： | 采用了激光微细熔覆柔性布线技术，结合数控CAD／CAM功能，在无掩模的基础上实现了在绝缘基板上直写厚膜电阻和电极单冗，但由于激光和电阻材料的相互作用是一个传热传质的复杂过程，电阻和电极间的界面行为将严重地影响该元件的可靠性和再现性等。针对上述情况，本文通过优化工艺设计方案进行电阻和电极的直写，并从电阻和电极界面的结合行为以及对形成电阻的表面性能、电气性能的影响进行分析和讨论。结果表明采用该优化工艺所制备的电阻和电极结合良好，性能和质量可靠稳定。
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| 关 键 词： | 厚膜电阻 无掩模 激光 电极 布线技术 基板 熔覆 绝缘 电气性能 元件 |
| 收稿时间： | 2004/10/18 |
Interfacial Behavior Research on Thick-film Resistance and Electrode by Laser Micro-fine Cladding and Flexibly Direct Writing |
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| LI Huiling ZENG Xiaoyan LI Huifen State Key Lab of Laser Technology,Huazhong University of Science and Technology,Wuhan Dept. of Industrial and Systems Engineering,The Hong Kong Polytechnic University,Hung Hom,Kowloon,Hong Kong.Interfacial Behavior Research on Thick-film Resistance and Electrode by Laser Micro-fine Cladding and Flexibly Direct Writing[J].Laser & Optoelectronics Progress,2005,42(2):48-51. |
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| Authors: | LI Huiling ZENG Xiaoyan LI Huifen State Key Lab of Laser Technology Huazhong University of Science and Technology Wuhan Dept of Industrial and Systems Engineering The Hong Kong Polytechnic University Hung Hom Kowloon Hong Kong |
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| Affiliation: | LI Huiling1 ZENG Xiaoyan1 LI Huifen2 State Key Lab of Laser Technology,Huazhong University of Science and Technology,Wuhan 430074 2Dept. of Industrial and Systems Engineering,The Hong Kong Polytechnic University,Hung Hom,Kowloon,Hong Kong |
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| Abstract: | Thick-film resistance and electrode unit directly written on insulating substrate without mask is realized when the author combines laser micro-fine cladding and direct writing with numerical control CAD/CAM function. But, it is a complicatedly diabatic and mass transport process that laser interacts with resistance materials. Interfacial behavior of resistance and electrode will have a severe effect on reliability and repeatability of the components. The authors adopts different methods to write resistance and electrode directly, and go on analyzing and discussing surface and electric properties of resistance affected by interfacial behavior of resistance and electrode. The results show that combination of electrodes and resistances fabricated by optimal processing is good , and their properties and quality are stable and reliable. |
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| Keywords: | laser micro-fine cladding flexibly direct writing resistance and electrode reliability and repeatability |
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