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High‐resolution,high‐throughput imaging with a multibeam scanning electron microscope |
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| Authors: | AL EBERLE S MIKULA R SCHALEK J LICHTMAN ML KNOTHE TATE D ZEIDLER |
| Affiliation: | 1. Carl Zeiss Microscopy GmbH, Oberkochen, Germany;2. Max‐Planck‐Institute for Medical Research, Heidelberg, Germany;3. Department of Molecular and Cell Biology, Harvard University, Cambridge, Massachusetts, U.S.A.;4. Graduate School of Biomedical Engineering, University of New South Wales, Sydney, Australia |
| Abstract: | Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single‐beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers. |
| Keywords: | High‐throughput imaging multibeam parallel data acquisition scanning electron microscopy |