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Toward structural/chemical cotailoring of phase‐change Ge–Sb–Te in a transmission electron microscope |
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| Authors: | W ZHANG J‐G KIM WT ZHENG XQ CUI Y‐J KIM SA SONG |
| Affiliation: | 1. Department of Materials Science, Key Laboratory of Mobile Materials MOE, State Key Laboratory of Superhard Materials, Jilin University, Changchun, China;2. Computational and Analytical Science Center, Samsung Advanced Institute of Technology, Yongin, South Korea;3. Korea Basic Science Institute, Daejeon, South Korea;4. Dongjin Semichem Co Ltd, Hwaseong, South Korea |
| Abstract: | Ge2Sb2Te5, as the prototype material for phase‐change memory, can be transformed from amorphous phase into nanoscale rocksalt‐type GeTe provided with an electron irradiation assisted by heating to 520°C in a 1250 kV transmission electron microscope. This sheds a new light into structural and chemical cotailoring of materials through coupling of thermal and electrical fields. |
| Keywords: | Amorphous Ge– Sb– Te rocksalt GeTe phase‐change memory electron microscopy HRTEM and image simulation |