High-performance ultralow-temperature polycrystalline silicon TFT using sequential lateral solidification |
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Authors: | Yong-Hae Kim Choong-Yong Sohn Jung Wook Lim Sun Jin Yun Chi-Sun Hwang Choong-Heui Chung Young-Wook Ko Jin Ho Lee |
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Affiliation: | Basic Res. Lab., Electron. & Telecommun. Res. Inst., Daejeon, South Korea; |
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Abstract: | This letter presents technologies to fabricate ultralow-temperature (< 150 /spl deg/C) polycrystalline silicon thin-film transistor (ULTPS TFT). Sequential lateral solidification is used for crystallization of RF magnetron sputter deposited amorphous silicon films resulting in a high mobility polycrystalline silicon (poly-Si) film. The gate dielectric is composed of plasma oxidation and Al/sub 2/O/sub 3/ grown by plasma-enhanced atomic layer deposition. The breakdown field on the poly-Si film was above 6.3 MV/cm. The fabricated ULTPS TFT showed excellent performance with mobility of 114 cm/sup 2//V /spl middot/ s (nMOS) and 42 cm/sup 2//V /spl middot/ s (pMOS), on/off current ratio of 4.20 /spl times/ 10/sup 6/ (nMOS) and 5.7 /spl times/ 10/sup 5/ (pMOS), small V/sub th/ of 2.6 V (nMOS) and -3.7 V (pMOS), and swing of 0.73 V/dec (nMOS) and 0.83 V/dec (pMOS). |
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