应用于快速倾斜镜的压电陶瓷驱动电源

压电陶瓷致动器具有体积小、推力大、高频响和分辨率高等特点，广泛应用于精密制造、光学仪器、振动控制等领域。为提高压电陶瓷型快速倾斜镜的控制精度和稳定性，根据压电陶瓷致动器对其驱动电源的要求，设计了一种基于高压运算放大器PA96的驱动电源。介绍了该电源电路的基本原理，并对放大器的外围电路进行了稳定性设计。最后通过实验测试表明，该电源线性度大于99%、静态纹波小于10mV、动态性能稳定，能够达到自适应光学系统中快速倾斜镜的控制要求。

A PZT driving power of fast steering mirror

With the advantages of small size, big push power, high frequency response and high resolution, piezoelectric ceramic actuators have been widely used in the fields of precise manufacture, optical instrument, vibration control，and etc. In order to improve the control accuracy and stability of the piezoelectric ceramic fast steering mirror，a driving power is designed on account of high voltage operational amplifier PA96 with the demand of piezoelectric ceramic actuator to its driving power. The basic principle of the power circuit is introduced，and the outside circuit of the amplifier is steadily designed. Finally indicated by the test of experiments，the linearity of the power is greater than 99%, the static ripple voltage is less than 10mV and the dynamic performance is stable, so the power can reach the control requirement of fast steering mirror in the system of adaptive optics.