A coupled two degree of freedom pull-in model for micromirrors under capillary force |
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Authors: | Ali Darvishian Hamid Moeenfard Mohammad Taghi Ahmadian Hassan Zohoor |
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Affiliation: | 1.School of Mechanical Engineering,Sharif University of Technology,Tehran,Iran;2.Center of Excellence in Design, Robotics and Automation, School of Mechanical Engineering,Sharif University of Technology,Tehran,Iran |
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Abstract: | The current paper presents a two degree of freedom model for the problem of micromirrors under capillary force. The principal
of minimum potential energy is employed for finding the equilibrium equations governing the deflection and the rotation of
the micromirror. Then, using the implicit function theorem, a coupled bending–torsion model is presented for pull-in characteristics
of micromirrors under capillary force and the concept of instability mode is introduced. It is observed that with increasing
ratio of bending and torsion stiffness, the dominant instability mode changes from bending mode to the torsion mode. In order
to verify the accuracy of the coupled model, static behavior of a group of micromirrors is investigated both analytically
using the presented model and numerically using the commercial finite element software ANSYS. It is observed that results
of the coupled model match well with the results of finite element simulations, but they both deviate considerably from the
results of the pure torsion model. The presented coupled model can be used for safe and stable design of micromirrors under
capillary force. |
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