| 大位移多折叠梁静电驱动器的设计及力学性能分析 |
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| 引用本文： | 赵江铭,陈晓阳,王小静.大位移多折叠梁静电驱动器的设计及力学性能分析[J].机械强度,2007,29(1):5-11. |
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| 作者姓名： | 赵江铭 陈晓阳 王小静 |
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| 作者单位： | 1. 上海大学,机电工程与自动化学院,上海,200072;郑州大学,机械工程学院,郑州,450001
2. 上海大学,机电工程与自动化学院,上海,200072 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)
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上海市青年科技启明星计划 |
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| 摘 要： | 针对现有微静电梳状谐振器用作驱动器时输出位移极小的弱点,提出一种结构新颖、输出位移大、能工作于谐振状态和静电力状态下的多折叠梁微静电驱动器设计方案.建立该驱动器的力学分析模型,给出位移、弹性系数和谐振频率的解析公式.研究表明,当特征尺寸相同时,与常用的直脚型和蟹脚型谐振器相比,在相同电压下其输出位移可提高7倍～14倍,而在相同最大应力条件下其位移输出能力可提高4倍～9倍.
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| 关 键 词： | 微机电系统 微静电驱动器 大位移输出 结构设计 大位移 折叠梁 静电力 驱动器 设计方案 力学性能分析 SUSPENSIONS ELECTROSTATIC ACTUATOR MICRO TYPE NOVEL ANALYSE CHARACTER MECHANICAL 输出能力 应力条件 梳状谐振器 脚型 特征尺寸 研究 |
| 修稿时间： | 2005-06-082005-08-10 |
DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS |
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| ZHAO JiangMing,CHEN XiaoYang,WANG XiaoJing.DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS[J].Journal of Mechanical Strength,2007,29(1):5-11. |
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| Authors: | ZHAO JiangMing CHEN XiaoYang WANG XiaoJing |
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| Abstract: | The existing micro electrostatic comb resonators working as actuators can only output little displacement, the authors developed a novel type of micro electrostatic actuator with multi-folded suspensions, which would be able to output large displacement and work in both the static and resonance state. The mechanical analytic model was developed, and the analytic expressions of the displacement, the stiffness coefficient and the resonance frequency were slated as wen. Comparing with the commonly used straight leg and crag leg resonators, the analytical results showed that, the displacement output could be improved to 7 - 14 times at the same driving voltage, and the ability of displacement output can be enhanced to 4 - 9 times under the same maximum stress. |
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| Keywords: | Micro electro-mechanical system Micro electrostatic actuator larger displacement output Structure design |
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