| 镀膜机控制系统原理及电路故障分析方法 |
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| 引用本文： | 陈晓东,王磊,何方,宋健.镀膜机控制系统原理及电路故障分析方法[J].电源技术,2011,35(9):1169-1170. |
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| 作者姓名： | 陈晓东 王磊 何方 宋健 |
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| 作者单位： | 中国电子科技集团公司第十八研究所,天津,300381 |
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| 摘 要： | 高真空镀膜机是目前应用电子束蒸发获得真空条件最为广泛的设备.空间用砷化镓太阳电池和单晶硅太阳电池金属膜及介质膜蒸镀主要依靠镀膜机来完成.其相关组成及各部件包括:机械泵、增压泵、油扩散泵、冷凝泵、分子泵、真空测量系统、膜厚监控系统、加热系统、行星架旋转系统、电子束蒸发系统等.要将所有部分有机融合成一体,需要一个稳定完善的...
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| 关 键 词： | 高真空镀膜机 工控机 可编程控制器( PLC) |
Theory of control system and method of analyzing failure of high vacuum evaporation system |
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| CHEN Xiao-dong,WANG Lei,HE Fang,SONG Jian.Theory of control system and method of analyzing failure of high vacuum evaporation system[J].Chinese Journal of Power Sources,2011,35(9):1169-1170. |
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| Authors: | CHEN Xiao-dong WANG Lei HE Fang SONG Jian |
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| Affiliation: | CHEN Xiao-dong,WANG Lei,HE Fang,SONG Jian(Tianjin Institute of Power Sources,Tianjin 300381,China) |
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| Abstract: | At present,the high vacuum evaporation system with e-gun is wildly used in semiconductor products.For example,the contact and AR coating of space GaAs solar cells and Si solar cells are all evaporated by this system.Usually,the system consists of: oil sealed rotary pump,roots blower,diffusion pump or cryo pump,measuring system,control and operating system,substrate heating system,internal jig system and evaporation source.The system need perfect control system so that it can work well.The theory of the cont... |
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| Keywords: | high vacuum evaporation system industrial personal computer programmable logic controller |
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