| 激光微刻蚀柔性红外热敏悬浮微桥研究 |
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| 引用本文： | 余荣.激光微刻蚀柔性红外热敏悬浮微桥研究[J].传感器世界,2007,13(5):10-12. |
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| 作者姓名： | 余荣 |
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| 作者单位： | 兰州物理研究所,表面工程技术国家重点实验室 |
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| 摘 要： | 本文研究使用激光微刻蚀方法制作红外热敏悬浮微桥的新工艺.用激光微刻蚀法制作了铂/聚酰亚胺热敏悬浮微桥,对微桥初样的热敏特性进行了测试,测试结果证实所制作的热敏微桥具有较好的热隔离性能.
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| 关 键 词： | 激光微刻蚀 红外微测辐射热计 热敏悬浮微桥 柔性基板 |
| 文章编号： | 1006-883X（2007）05-0010-04 |
Study Of Ir Heat-Sensitivity Suspended Microbridge On Flexible Substrate By Laser Micro-Echting |
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| Abstract: | A new manufacturing technique of IR heat-sensitive suspended miocrobridge using laser micro-etching method is studied. A Pt / polyimide heat-sensitive suspended microbridge has been manufactured by laser micro-etching technique. The performance parameters of Pt/polyimide suspended microbridge has been tested and the results have proved that IR heat-sensitivity microbridge can efficiently prevent heat conducting between heat-sensitive film and the substrate. |
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| Keywords: | laser micro-eching IR microbolometer heat-sensitive suspended microbridge flexible substrat |
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