|
|||||
|
|
| 考虑梳齿动态特性的微加速度计敏感结构等效电学模型 | |
| 引用本文： | 刘云涛,赵磊,王颖,邵雷. 考虑梳齿动态特性的微加速度计敏感结构等效电学模型[J]. 哈尔滨工程大学学报, 2012, 33(8): 1046-1051 |
| 作者姓名： | 刘云涛 赵磊 王颖 邵雷 |
| 作者单位： | 1. 哈尔滨工程大学信息与通信工程学院,黑龙江哈尔滨150001;中国科学院微电子研究所,北京100029 2. 中国航天科工集团第二研究院,北京,100854 3. 哈尔滨工程大学信息与通信工程学院,黑龙江哈尔滨,150001 |
| 基金项目： | 中央高校基本科研业务费专项基金资助项目(HEUCF110801) |
| 摘 要： | 为确保Σ△(sigma-delta)微加速度计系统仿真的正确性,提出一种改进的敏感结构等效电学模型.在分析传统敏感结构等效电学模型局限性的基础上,研究了结构梳齿在外力作用下发生弯曲对闭环系统的影响和使∑△闭环反馈失效的机理,分析了梳齿弯曲对质量块所受静电合力的影响,结合传统电学模型,建立了包含梳齿弯曲因素的改进的等效电学模型.在微加速度计系统仿真中,利用敏感结构的传统模型并不能反映出调制器失效特性,输出显示调制器仍然正常工作,而利用所建立的敏感结构电学模型能够准确的表现出∑△反馈失效现象,为电路仿真的准确性提供了保障. |
| 关 键 词： | 等效电学模型 ∑△闭环 微机械加速度计 感应梳齿 |
An improved equivalent electrical model for the sensing element of an accelerometer with comb finger dynamics |
|
| LIU Yuntao , ZHAO Lei , WANG Ying , SHAO Lei. An improved equivalent electrical model for the sensing element of an accelerometer with comb finger dynamics[J]. Journal of Harbin Engineering University, 2012, 33(8): 1046-1051 | |
| Authors: | LIU Yuntao ZHAO Lei WANG Ying SHAO Lei |
| Affiliation: | 1(1.College of Information and Communication Engineering,Harbin Engineering University,Harbin 150001,China;2.Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;3.The Second Academy,China Aerospace Science and Industry Corp,Beijing 100854,China) |
| Abstract: | An improved equivalent electrical model for the sensing element of an accelerometer was presented to guarantee the validity of sigma-delta(ΣΔ) micromachined accelerometer simulation.The reason for the bend of comb finger under exterior force causing the ΣΔ closed-loop feedback to be disabled was studied based on the analysis of the limitation of a traditional equivalent model.The influence of the bend of the comb finger on the electrostatic force applied to a proof-mass was analyzed.Along with the traditional model,an improved equivalent electrical model which combines the dynamics of both the proof-mass and the sensing fingers for structures was established.The simulation results show that in accelerometer system simulation,utilizing the traditional model cannot reflect the failure characteristics of the modulator,and the output shows that the modulator works properly.However,using the improved model established in this work would capture the failure of the ΣΔ closed-loop feedback,providing a guarantee for the validity of circuit simulation. |
| Keywords: | equivalent electrical model ΣΔ closed-loop micromachined accelerometer comb finger |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |