| 我国改良西门子法多晶硅生产技术进展 |
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| 引用本文： | 严世权,叶芸华. 我国改良西门子法多晶硅生产技术进展[J]. 有色金属材料与工程, 2010, 31(4): 167-170 |
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| 作者姓名： | 严世权 叶芸华 |
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| 作者单位： | [1]上海市有色金属学会,上海200070 [2]上海九0一厂,上海201600 |
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| 摘 要： | 简述了近几年我国改良西门子法多晶硅的技术进展,列出了大部分已建和在建多晶硅厂(公司)。文中给出了多晶硅产量、电能单耗和SiCl4热氢化的一些数据,并指出当前生产中存在的一些问题。
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| 关 键 词： | 改良西门子法 多晶硅 一次转化率 生产 |
Progress of Modified Siemens Technology for Producing Polycrystalline Silicon in China |
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| YAN Shi-quan,YE Yun-hua. Progress of Modified Siemens Technology for Producing Polycrystalline Silicon in China[J]. Nonferrous Metal Materials and Engineering, 2010, 31(4): 167-170 |
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| Authors: | YAN Shi-quan YE Yun-hua |
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| Affiliation: | 1.Shanghai Society of Nonferrous Metals,Shanghai 200070,China;2.Shanghai No 901 Factory,Shanghai 201600,China) |
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| Abstract: | The progress of the modified Siemens technology for producing polycrystalline silicon in China during the recent years was reviewed.Factories using the technology were listed with the data for their outputs,unit electric consumptions and hydrogenation of SiCl4 given.Meantime,problems existing with the production were pointed out. |
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| Keywords: | modified Siemens technology polycrystalline silicon one-time conversion rate production |
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