SiOCN Functionalized Carbon Nanotube Gas Sensors for Elevated Temperature Applications |
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| Authors: | Aylin Karakuscu Lung‐Hao Hu Andrea Ponzoni Camilla Baratto Riccardo Ceccato Giorgio Sberveglieri Rishi Raj |
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| Affiliation: | 1. Department of Information Engineering, CNR‐IDASC & University of Brescia SENSOR Lab, Brescia, Italy;2. Department of Mechanical Engineering, University of Colorado, Boulder, Colorado;3. Department of Industrial Engineering, University of Trento, Trento, Italy |
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| Abstract: | Silicon Oxycarbonitride (SiOCN) functionalization is proposed for stable, reproducible, reliable, and enhanced gas‐sensing properties in carbon nanotube (CNT) gas sensors. The process is very simple: liquid precursor completely coats the surfaces of the CNTs without requiring any surface modification and a thin layer of semiconductor ceramic SiOCN is created on the CNTs after heat treatment. This new kind of conductometric gas sensors can detect 10 ppm NH3 and 2 ppm NO2 at temperatures up to 350°C. The stability of the functionalized CNT sensor is verified up to 520°C, while the CNT sensor without the SiOCN coating lost conductance after 250°C due to the structural modification. SiOCN functionalization of CNT changes the recovery from irreversible to reversible and the recovery time decreases from 60 min at 100°C to 19 min at 350°C. |
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