双波长激光干涉移相式测量长度技术研究

研究了应用移相干涉术测量新的一等量块的方法。对干涉图像进行多幅图的采样,由移相法计算量块测量面和与其研合的辅助平晶表面的波面面形,尤其研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术,得到表征其表面的离散波差值,并给出量块工作面长度和长度变动量的测量结果。

Research on the technology measurement of length by double wavelength laser interference using phase shift

The method of measuring new first grade gauge block by phase shift interferometry has been studied. Firstly, multi-frame interference patterns are captured by CCD. Then the shape of the measured surface of the gauge and the assistant reference flat to be wrung are obtained by phase shift arithmetic. In particular, the unwrapping wavefront principle and technology when there are step and discontinuity in the gauge interference patterns are studied, and the discrete wave error is calculated to fit to a continuous and smooth surface. Measurement of guage block length is discussed, and measured result about dynamic argument of gauge block working face length is presented.