| 多头小离子源和离子束辅助蒸发新工艺 |
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| 引用本文： | 严一心,刘卫国.多头小离子源和离子束辅助蒸发新工艺[J].西安工业学院学报,1992,12(2):27-31. |
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| 作者姓名： | 严一心 刘卫国 |
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| 作者单位： | 西安工业学院仪器工程系，西安工业学院仪器工程系，西安工业学院仪器工程系，西安工业学院仪器工程系 |
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| 基金项目： | 兵器工业总公司军品局科研基金 IGV 8941 |
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| 摘 要： | 提出了多头离子源的方案和离子束合成技术,即选用几个小离子源组合应用,以满足大尺寸镀膜机的要求.该方案经在A700Q和BAK760镀膜机上试验,获得良好效果,已镀制出性能良好的铝、银金属高反膜、棱镜分光膜、308nm激光高反膜、透明导电膜、高级立体声磁头绝缘膜、长波通滤光膜、超宽带增透膜等.并且,简化了镀膜工艺,提高了生产效率.
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| 关 键 词： | 离子源 离子束 薄膜 镀膜 |
MINI MULTI-SOURCES AND ION BEAM ASSISTED DEPOSITION NEW PROCESS |
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| Yan Yixin Liu Weiguo Lu Jinjun Liu Jixiang.MINI MULTI-SOURCES AND ION BEAM ASSISTED DEPOSITION NEW PROCESS[J].Journal of Xi'an Institute of Technology,1992,12(2):27-31. |
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| Authors: | Yan Yixin Liu Weiguo Lu Jinjun Liu Jixiang |
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| Affiliation: | Yan Yixin Liu Weiguo Lu Jinjun Liu Jixiang |
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| Abstract: | A multi-sources and ion beams combination technique is presented. Two or more mini ion sources are used simutaneously to meet the needs of large scale coaters. This technique has been used in A700Q and BAK760 coaters and good results are achieved. High-quality films, such as Al and Ag high reflection films, prism beam splitter, 308nm laser high reflection films, transparent electricity conducting film, insulating film in high-rank stereo magnet head, long-pass filters, ultra-wide band anti-reflection films etc, are coated with this technique. The coating processes are simplified, the product efficiency is improved. |
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| Keywords: | ion sources ion beams thin films |
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