Affiliation: | 1. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian 116024, PR China;2. School of Electronic Science and Technology, Key Lab. of State of Liaoning for Integrated Circuits Technology, Dalian University of Technology, Dalian 116024, PR China;3. Key Laboratory of Ministry of Education for Application Technology of Chemical Materials in Hainan Superior Resources, Hainan University, Haikou 570228, PR China;4. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, PR China;5. Center for Industrial Sensors and Measurements (CISM), Department of Materials Science and Engineering, The Ohio State University, Columbus, OH 43210, USA |